Nonlinear Piezoresistance Effect in Devices with Stressed Etch Stop Liner

Bach, K. H.; Liebmann, R.; Nawaz, M.; Jungemann, Christoph; Ungersboeck, Enzo

Wien [u.a.] : Springer Vienna (2007)
Contribution to a book, Contribution to a conference proceedings

In: Simulation of semiconductor processes and devices 2007 : SISPAD 2007 : SISPAD 2004 ; [proceedings of the Twelfth International Conference on Simulation of Semiconductor Processes and Devices held in September 2007, at the TU Wien, Vienna, Austria] / Tibor Grasser; Siegfried Selberherr (eds.)
Page(s)/Article-Nr.: 113-116


  • Chair and Institute of Theoretical Electrical Engineering [611410]